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Integrated Microsystems Lab

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Innovative Academic Research

UD's Integrated Microsystems Lab pursues pioneering engineering and technology research and development. The lab's research and development is translated into commercial products. The lab also provides resources to industries and trains highly skilled engineers, scientists and technicians with advanced knowledge in micro- to nano-scale electronics, fabrication, integration and packaging.

Leadership in "More-than-Moore" Microsystems Technology

  • Develop high-value, system-on-chip and system-in-package technologies reaching beyond conventional semiconductor technologies.
  • Use sensors and actuators, MEMS and microfluidics, wearable devices and implants, and on-chip analog, RF, optical and power components.
  • Ultra-clean, wafer-level vacuum encapsulation MEMS technologies.
  • Extensive resources in design, fabrication, testing, integration and packaging.
Research Focus Areas

CMOS Microelectronics and Sensors
  • Signal detection and processing interfaces for integrated optical and electrochemical sensors
  • Capacitive, piezoresistive, piezoelectric, and resonant sensing interfaces for MEMS sensors
  • Wireless sensing interfaces for implantable biomedical microdevices
  • Extreme-/harsh-environment sensor signal processing interfaces

MEMS, RF-MEMS, BioMEMS, and NeuroMEMS
  • Pressure sensors
  • Inertial sensors (accelerometers and gyroscopes)
  • Flow sensors
  • Silicon and silicon carbide neural electrodes
  • All-silicon timing and frequency references
  • Piezoelectric MEMS
  • Extreme/harsh environment sensors
  • RF MEMS switches and filters

Implants, Prosthetics and Wearables
  • Smart wearable devices for therapy and rehabilitation
  • Traumatic condition monitoring
  • Capsule endoscopy
  • Brain machine interfaces
  • Assistive living devices

Biological and Chemical Sensors
  • Monitoring for medical and clinical applications
  • Biological cells and bacterial culture analysis
  • Soil and water pollutant monitoring
  • Food and personal safety
  • National security