Nanoscale Device Fabrication

The Nanofab Laboratory was established by sponsored research projects from the Ohio Third Frontier program, the Department of Defense and industry partners.  The main focus of this laboratory is photonic device fabrication and optical thin film development. The principal investigator is Dr. Andrew Sarangan.

Central innovation: Concept to market.

Thin Films

RF/DC Plasma Sputter Deposition System
Electron Beam Evaporator
Plasma enhanced chemical vapor deposition (PECVD)


Inductively coupled plasma (ICP) etching

Substrate cleaning and priming

Vapor prime/Image reversal
Megasonic cleaning
Plasma cleaning and surface activation


Mask aligner
Spin coater
Spray developer
Deep-UV Laser interference lithography

Thermal processes

Diffusion and thermal oxidation
Rapid thermal annealing (RTA)
Contact bake station
Gravity convection oven


Substrate bonding/Nano-imprint


Stylus profiler
Transmission/Reflection spectrum
Horizontal microscope

Nanofab Lab

Dr. Andrew Sarangan, Director

Fitz Hall 572 A 
300 College Park 
Dayton, Ohio 45469 - 0000

937-229-3190 or 937-229-1037